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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Electron beam lithography on non-conductive substrates
 Hovádková, Zuzana ; Šamořil, Tomáš (referee) ; Dvořák, Petr (advisor)
The expansion of electron beam lithography has been really fast during last years. It is mostly because its capability to create big structures with a fine resolution. This study focuses on electron beam lithography on non-conductive substrates, exactly on glass. The lithography on glass is mostly used in life sciences. Because of the transparence of the substrate and its non-toxicity it can be used for cell adhesion. In the experimental section there are shown and compared two techniques how to compensate the charge accumulated on the top of the surface.
Detailed record
Electron beam lithography on non-conductive substrates
 Hovádková, Zuzana ; Šamořil, Tomáš (referee) ; Dvořák, Petr (advisor)
The expansion of electron beam lithography has been really fast during last years. It is mostly because its capability to create big structures with a fine resolution. This study focuses on electron beam lithography on non-conductive substrates, exactly on glass. The lithography on glass is mostly used in life sciences. Because of the transparence of the substrate and its non-toxicity it can be used for cell adhesion. In the experimental section there are shown and compared two techniques how to compensate the charge accumulated on the top of the surface.
Detailed record

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